Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 3/02/08 → 31/12/08 |
Atomic-Layer-Deposition Facility for 2D and 3D Conformal Coating of Nanostructures
- Tan, Hoe (PI)
- Craig, Vince (CoI)
- Jagadish, Chennupati (CoI)
Project: Research
Project: Research
| Status | Finished |
|---|---|
| Effective start/end date | 3/02/08 → 31/12/08 |