Crack-free, thick SiNx deposition

    Project: Research

    Project Details

    Description

    USYD are contracting Duk to perform research services for them. The terms of the agreement are the standard research services contracting terms used by USYD. Crack free, thick SiNx deposition. Two stages approaches1st stage: thin film on Si for Eg, composition, index optimization, reproducibility check for all the 3 compositions (x=0.45, 0.55, 0.65)2nd stage: thick film on glass optimization for crack-free
    StatusFinished
    Effective start/end date1/06/2331/10/23

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