Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 1/11/10 → 20/01/12 |
Development of a new plasma source for next generation plasma etch processing equipment
- Charles, Christine (PI)
- Boswell, Roderick (CoI)
Project: Research
Project: Research
| Status | Finished |
|---|---|
| Effective start/end date | 1/11/10 → 20/01/12 |