Development of Inert Gas Ion Beams for Fabrication of Nano-Structures

    Project: Research

    Project Details

    Description

    This project will develop a high brightness, high density ion beam for reactive fabrication of structures with dimensions of the order of and less than 100 nano-metres. Present systems use liquid metal ion sources which can pollute the substrates being fabricated. Use of inert gas ions will overcome this problem and lead to a new type of ion source to replace the older systems. Added advantages include significantly increased lifetime much higher reproducibility. Our commercial collaborator, FEI Company, estimate the world market as being $US100,000,000 and will actively promote this technology worldwide when it is fully developed.
    StatusFinished
    Effective start/end date18/12/0331/12/08

    Funding

    • Australian Research Council (ARC): A$300,000.00
    • FEI Company: A$169,500.00

    Fingerprint

    Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.