Development of Inert Gas Ion Beams for Fabrication of Nano-Structures

    Project: Research

    Project Details


    This project will develop a high brightness, high density ion beam for reactive fabrication of structures with dimensions of the order of and less than 100 nano-metres. Present systems use liquid metal ion sources which can pollute the substrates being fabricated. Use of inert gas ions will overcome this problem and lead to a new type of ion source to replace the older systems. Added advantages include significantly increased lifetime much higher reproducibility. Our commercial collaborator, FEI Company, estimate the world market as being $US100,000,000 and will actively promote this technology worldwide when it is fully developed.
    Effective start/end date18/12/0331/12/08


    • Australian Research Council (ARC): A$300,000.00
    • FEI Company: A$169,500.00


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