Project Details
Description
This project will develop a high brightness, high density ion beam for reactive fabrication of structures with dimensions of the order of and less than 100 nano-metres. Present systems use liquid metal ion sources which can pollute the substrates being fabricated. Use of inert gas ions will overcome this problem and lead to a new type of ion source to replace the older systems. Added advantages include significantly increased lifetime much higher reproducibility. Our commercial collaborator, FEI Company, estimate the world market as being $US100,000,000 and will actively promote this technology worldwide when it is fully developed.
Status | Finished |
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Effective start/end date | 18/12/03 → 31/12/08 |
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