Ex-led: LIEF25: Plasma-enhanced chemical vapour deposition tool for doped silicon films

Plasma-enhanced chemical vapour deposition tool for doped silicon films. This capability is not available at ANU, or indeed anywhere else in Australia. It would be extremely useful for our research on high efficiency solar cells at ANU, and would help to drive increased collaboration with UNSW, and allow us to attract more industry partners for our research. It will also provide excellent training opportunities for our research students and early-career researchers. ANU would be afforded free access to the tool once commissioned. This represents excellent value for the initial one-off investment.