LE200100003 - 3D Nanofabrication and Nanocharacterisation facility

  • Aharonovich, Igor (PI)
  • Fu, Lan (PI)
  • Bell, John Marcus (CoI)
  • Dawes, Judith Margaret (CoI)
  • Hicks, Damien (CoI)
  • Iacopi, Francesca (CoI)
  • Martyniuk, Mariusz (CoI)
  • Micolich, Adam Paul (CoI)
  • Mildren, Richard (CoI)
  • Phillips, Matthew (CoI)
  • Rahmani, Mohsen (CoI)
  • Toth, Milos (CoI)

    Project: Research

    Project Details

    Description

    This project will establish a revolutionary nanoscale fabrication and characterisation facility in Australia. Thefacility contains an angle based nano-etching machine with integrated concurrent chemical analysis capabilities,and will be the first instrument of its kind in Australia. The facility will enable unprecedented fabrication andcharacterisation of 3D nanostructures and new device geometries from semiconductors, oxides and metals thatunderpin modern nanoelectronics for innovative energy, nano-optical and quantum device applications. Thisunique equipment will facilitate breakthrough discoveries in nanomaterials and foster collaborations amongstAustralian researchers to accelerate industry in advanced nanodevice technologies.
    StatusFinished
    Effective start/end date1/05/2031/12/20

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