National Nanolithography Facility

  • Jagadish, Chennupati (PI)
  • Buda, Manuela (CoI)
  • Craig, Vince (CoI)
  • Eggleton, Benjamin J (CoI)
  • Faraone, Lorenzo (CoI)
  • Fu, Lan (CoI)
  • Gao, Qiang (CoI)
  • Kane, Deborah (CoI)
  • Kivshar, Yuri (CoI)
  • Krolikowski, Wieslaw (CoI)
  • Luther-Davies, Barry (CoI)
  • Madden, Steve (CoI)
  • Neshev, Dragomir (CoI)
  • Tan, Hoe (CoI)
  • Williams, Jim (CoI)
  • Withford, Michael (CoI)
  • Wong Leung, Jennifer (CoI)

    Project: Research

    Project Details


    This project aims to establish a state-of-the-art Nanolithography facility for the Australian Nanotechnology, Photonics and Electronics research community to develop novel nanoscale photonic and electronic devices for defense, communications, computing, energy, environment and health applications. The National Nanolithography Facility will allow the fabrication of nanoscale electronic, photonic and sensor devices. This facility will allow research training in state of the art techniques in the field of nanotechnology. This facility will further enhance the core capabilities in the emerging area of nanoscale science and technology in Australia.
    Effective start/end date1/01/0631/12/08


    • University of Queensland (UQ): A$60,000.00
    • University of Sydney: A$100,000.00
    • University of Western Australia (UWA): A$100,000.00
    • Macquarie University: A$75,000.00
    • Australian National University (ANU): A$250,000.00
    • Australian Research Council (ARC): A$1,000,000.00
    • Australian National University (ANU): A$50,000.00