2-DOF Mems Mirror with Large Mechanical Angles Using One Magnetic Field for Close Range Scanning Applications

Dang D.H. Tran; Ludovic Rapp; Steve Madden; Laurence J. Walsh; Heiko Spallek; Lee Walsh; Andrew Sutton; Omar Zuaiter; Alaa Habeb; Timothy R. Hirst; Andrei V. Rode; Peter Woodfield; Dzung Dao; Van Thanh Dau

2-DOF Mems Mirror with Large Mechanical Angles Using One Magnetic Field for Close Range Scanning Applications

Dang D.H. Tran^*, Ludovic Rapp, Steve Madden, Laurence J. Walsh, Heiko Spallek, Lee Walsh, Andrew Sutton, Omar Zuaiter, Alaa Habeb, Timothy R. Hirst, Andrei V. Rode, Peter Woodfield, Dzung Dao^*, Van Thanh Dau^*

^*Corresponding author for this work

The Australian National University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

This paper presents for the first time a micro-size MEMS mirror design that achieves large rotational mechanical angles of two axes using single electromagnetic field. The mirror features special packaging method that corrects the coupling effect between the axes, resulting in highly stable mechanical angle response. Additionally, the mirror includes honeycomb structures on the backside that distribute weight uniformly, improving stability. At resonant mode, The MEMS mirror reaches rotational mechanical angles of 10 degrees in the fast axis and 20 degrees in the slow axis with the current of mA order, which allows this mirror working for close-range scanning applications, such as dental ablation. The design, simulation, and fabrication processes are described, and the experimental results demonstrate this MEMS mirror has the largest mechanical angles which is currently not commercially available.

Original language	English
Title of host publication	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	839-841
Number of pages	3
ISBN (Electronic)	9784886864352
Publication status	Published - 2023
Event	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, Japan Duration: 25 Jun 2023 → 29 Jun 2023

Publication series

Name	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Conference

Conference	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Country/Territory	Japan
City	Kyoto
Period	25/06/23 → 29/06/23

Cite this

Tran, D. D. H., Rapp, L., Madden, S., Walsh, L. J., Spallek, H., Walsh, L., Sutton, A., Zuaiter, O., Habeb, A., Hirst, T. R., Rode, A. V., Woodfield, P., Dao, D., & Dau, V. T. (2023). 2-DOF Mems Mirror with Large Mechanical Angles Using One Magnetic Field for Close Range Scanning Applications. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 (pp. 839-841). (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023). Institute of Electrical and Electronics Engineers Inc..

Tran, Dang D.H. ; Rapp, Ludovic ; Madden, Steve et al. / 2-DOF Mems Mirror with Large Mechanical Angles Using One Magnetic Field for Close Range Scanning Applications. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc., 2023. pp. 839-841 (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

@inproceedings{59fa1e9bb8b54adda7025b23e1c3148d,

title = "2-DOF Mems Mirror with Large Mechanical Angles Using One Magnetic Field for Close Range Scanning Applications",

abstract = "This paper presents for the first time a micro-size MEMS mirror design that achieves large rotational mechanical angles of two axes using single electromagnetic field. The mirror features special packaging method that corrects the coupling effect between the axes, resulting in highly stable mechanical angle response. Additionally, the mirror includes honeycomb structures on the backside that distribute weight uniformly, improving stability. At resonant mode, The MEMS mirror reaches rotational mechanical angles of 10 degrees in the fast axis and 20 degrees in the slow axis with the current of mA order, which allows this mirror working for close-range scanning applications, such as dental ablation. The design, simulation, and fabrication processes are described, and the experimental results demonstrate this MEMS mirror has the largest mechanical angles which is currently not commercially available.",

keywords = "2 DOF MEMS mirror, large deflection, laser scanning, single magnetic field",

author = "Tran, {Dang D.H.} and Ludovic Rapp and Steve Madden and Walsh, {Laurence J.} and Heiko Spallek and Lee Walsh and Andrew Sutton and Omar Zuaiter and Alaa Habeb and Hirst, {Timothy R.} and Rode, {Andrei V.} and Peter Woodfield and Dzung Dao and Dau, {Van Thanh}",

note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",

year = "2023",

language = "English",

series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "839--841",

booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",

address = "United States",

}

Tran, DDH, Rapp, L , Madden, S, Walsh, LJ, Spallek, H, Walsh, L, Sutton, A, Zuaiter, O, Habeb, A, Hirst, TR, Rode, AV, Woodfield, P, Dao, D & Dau, VT 2023, 2-DOF Mems Mirror with Large Mechanical Angles Using One Magnetic Field for Close Range Scanning Applications. in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Institute of Electrical and Electronics Engineers Inc., pp. 839-841, 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Kyoto, Japan, 25/06/23.

2-DOF Mems Mirror with Large Mechanical Angles Using One Magnetic Field for Close Range Scanning Applications. / Tran, Dang D.H.; Rapp, Ludovic ; Madden, Steve et al.
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc., 2023. p. 839-841 (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - 2-DOF Mems Mirror with Large Mechanical Angles Using One Magnetic Field for Close Range Scanning Applications

AU - Tran, Dang D.H.

AU - Rapp, Ludovic

AU - Madden, Steve

AU - Walsh, Laurence J.

AU - Spallek, Heiko

AU - Walsh, Lee

AU - Sutton, Andrew

AU - Zuaiter, Omar

AU - Habeb, Alaa

AU - Hirst, Timothy R.

AU - Rode, Andrei V.

AU - Woodfield, Peter

AU - Dao, Dzung

AU - Dau, Van Thanh

PY - 2023

Y1 - 2023

N2 - This paper presents for the first time a micro-size MEMS mirror design that achieves large rotational mechanical angles of two axes using single electromagnetic field. The mirror features special packaging method that corrects the coupling effect between the axes, resulting in highly stable mechanical angle response. Additionally, the mirror includes honeycomb structures on the backside that distribute weight uniformly, improving stability. At resonant mode, The MEMS mirror reaches rotational mechanical angles of 10 degrees in the fast axis and 20 degrees in the slow axis with the current of mA order, which allows this mirror working for close-range scanning applications, such as dental ablation. The design, simulation, and fabrication processes are described, and the experimental results demonstrate this MEMS mirror has the largest mechanical angles which is currently not commercially available.

AB - This paper presents for the first time a micro-size MEMS mirror design that achieves large rotational mechanical angles of two axes using single electromagnetic field. The mirror features special packaging method that corrects the coupling effect between the axes, resulting in highly stable mechanical angle response. Additionally, the mirror includes honeycomb structures on the backside that distribute weight uniformly, improving stability. At resonant mode, The MEMS mirror reaches rotational mechanical angles of 10 degrees in the fast axis and 20 degrees in the slow axis with the current of mA order, which allows this mirror working for close-range scanning applications, such as dental ablation. The design, simulation, and fabrication processes are described, and the experimental results demonstrate this MEMS mirror has the largest mechanical angles which is currently not commercially available.

KW - 2 DOF MEMS mirror

KW - large deflection

KW - laser scanning

KW - single magnetic field

UR - http://www.scopus.com/inward/record.url?scp=85193518273&partnerID=8YFLogxK

UR - https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10517269&tag=1

M3 - Conference contribution

AN - SCOPUS:85193518273

T3 - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

SP - 839

EP - 841

BT - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Y2 - 25 June 2023 through 29 June 2023

ER -

Tran DDH, Rapp L , Madden S, Walsh LJ, Spallek H, Walsh L et al. 2-DOF Mems Mirror with Large Mechanical Angles Using One Magnetic Field for Close Range Scanning Applications. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc. 2023. p. 839-841. (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

2-DOF Mems Mirror with Large Mechanical Angles Using One Magnetic Field for Close Range Scanning Applications

Abstract

Publication series

Conference

Other files and links

Fingerprint

Cite this