@inproceedings{e8590ab22a414d06910718baf00990fe,
title = "A Compare Study of LPCVD Silicon Nitride Deposited on (100) and (111) Silicon Surface",
author = "Hao Jin and Klaus Weber and Andrew Blakers",
year = "2005",
language = "English",
isbn = "7532382257",
pages = "301--302",
editor = "{Cui Rongqiang, Chen Tingjin, Li Guoxin, Sun Tietun}",
booktitle = "TECHNICAL DIGEST 15th International Photovoltaic Science and Engineering Conference (PVSEC-15)",
publisher = "Shanghai Scientific & Technological Literature Publishing House",
note = "International Photovoltaic Science and Engineering Conference (PVSEC 2005) ; Conference date: 01-01-2005",
}