A Compare Study of LPCVD Silicon Nitride Deposited on (100) and (111) Silicon Surface

Hao Jin; Klaus Weber; Andrew Blakers

A Compare Study of LPCVD Silicon Nitride Deposited on (100) and (111) Silicon Surface

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper

Original language	English
Title of host publication	TECHNICAL DIGEST 15th International Photovoltaic Science and Engineering Conference (PVSEC-15)
Editors	Cui Rongqiang, Chen Tingjin, Li Guoxin, Sun Tietun
Place of Publication	Shanghai
Publisher	Shanghai Scientific & Technological Literature Publishing House
Pages	301-302
ISBN (Print)	7532382257
Publication status	Published - 2005
Event	15th International Photovoltaic Science and Engineering Conference (PVSEC-15), 2005 - Shanghai, China Duration: 10 Oct 2005 → 15 Oct 2005 https://www.gbv.de/dms/tib-ub-hannover/532783093.pdf https://www.pvsec.org/history/previous-conferences.html#:~:text=2005-,PVSEC%2D15,-Shanghai%2C%20China https://www.pvsec.org/_userdata/Technical_program/Technical_program_PVSEC-15.pdf

Conference

Conference	15th International Photovoltaic Science and Engineering Conference (PVSEC-15), 2005
Abbreviated title	PVSEC-15
Country/Territory	China
City	Shanghai
Period	10/10/05 → 15/10/05
Internet address	https://www.gbv.de/dms/tib-ub-hannover/532783093.pdf https://www.pvsec.org/history/previous-conferences.html#:~:text=2005-,PVSEC%2D15,-Shanghai%2C%20China https://www.pvsec.org/_userdata/Technical_program/Technical_program_PVSEC-15.pdf

Cite this

Jin, Hao ; Weber, Klaus ; Blakers, Andrew. / A Compare Study of LPCVD Silicon Nitride Deposited on (100) and (111) Silicon Surface. TECHNICAL DIGEST 15th International Photovoltaic Science and Engineering Conference (PVSEC-15). editor / Cui Rongqiang, Chen Tingjin, Li Guoxin, Sun Tietun. Shanghai : Shanghai Scientific & Technological Literature Publishing House, 2005. pp. 301-302

@inproceedings{e8590ab22a414d06910718baf00990fe,

title = "A Compare Study of LPCVD Silicon Nitride Deposited on (100) and (111) Silicon Surface",

author = "Hao Jin and Klaus Weber and Andrew Blakers",

year = "2005",

language = "English",

isbn = "7532382257",

pages = "301--302",

editor = "{Cui Rongqiang, Chen Tingjin, Li Guoxin, Sun Tietun}",

booktitle = "TECHNICAL DIGEST 15th International Photovoltaic Science and Engineering Conference (PVSEC-15)",

publisher = "Shanghai Scientific & Technological Literature Publishing House",

note = "15th International Photovoltaic Science and Engineering Conference (PVSEC-15), 2005, PVSEC-15 ; Conference date: 10-10-2005 Through 15-10-2005",

url = "https://www.gbv.de/dms/tib-ub-hannover/532783093.pdf, https://www.pvsec.org/history/previous-conferences.html#:~:text=2005-,PVSEC%2D15,-Shanghai%2C%20China, https://www.pvsec.org/_userdata/Technical_program/Technical_program_PVSEC-15.pdf",

}

Jin, H, Weber, K & Blakers, A 2005, A Compare Study of LPCVD Silicon Nitride Deposited on (100) and (111) Silicon Surface. in CRCTLGST (ed.), TECHNICAL DIGEST 15th International Photovoltaic Science and Engineering Conference (PVSEC-15). Shanghai Scientific & Technological Literature Publishing House, Shanghai, pp. 301-302, 15th International Photovoltaic Science and Engineering Conference (PVSEC-15), 2005, Shanghai, China, 10/10/05.

A Compare Study of LPCVD Silicon Nitride Deposited on (100) and (111) Silicon Surface. / Jin, Hao; Weber, Klaus ; Blakers, Andrew.
TECHNICAL DIGEST 15th International Photovoltaic Science and Engineering Conference (PVSEC-15). ed. / Cui Rongqiang, Chen Tingjin, Li Guoxin, Sun Tietun. Shanghai: Shanghai Scientific & Technological Literature Publishing House, 2005. p. 301-302.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper

TY - GEN

T1 - A Compare Study of LPCVD Silicon Nitride Deposited on (100) and (111) Silicon Surface

AU - Jin, Hao

AU - Weber, Klaus

AU - Blakers, Andrew

PY - 2005

Y1 - 2005

M3 - Conference Paper

SN - 7532382257

SP - 301

EP - 302

BT - TECHNICAL DIGEST 15th International Photovoltaic Science and Engineering Conference (PVSEC-15)

A2 - null, Cui Rongqiang, Chen Tingjin, Li Guoxin, Sun Tietun

PB - Shanghai Scientific & Technological Literature Publishing House

CY - Shanghai

T2 - 15th International Photovoltaic Science and Engineering Conference (PVSEC-15), 2005

Y2 - 10 October 2005 through 15 October 2005

ER -