A new horizon in secondary neutral mass spectrometry: Post-ionization using a VUV free electron laser

Igor V. Veryovkin*, Wallis F. Calaway, Jerry F. Moore, Michael J. Pellin, John W. Lewellen, Yuelin Li, Stephen V. Milton, Bruce V. King, Mladen Petravić

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    12 Citations (Scopus)

    Abstract

    A new time-of-flight (TOF) mass spectrometer incorporating post-ionization of sputtered neutral species with tunable vacuum ultraviolet (VUV) light generated by a free electron laser (FEL) has been developed. Capabilities of this instrument, called SPIRIT, were demonstrated by experiments with photoionization of sputtered neutral gold atoms with 125nm light generated by the VUV FEL located at Argonne National Laboratory (ANL). In a separate series of experiments with a fixed wavelength VUV light source, a 157nm F 2 laser, a useful yield (atoms detected per atoms sputtered) of about 12% and a mass resolution better than 1500 were demonstrated for molybdenum.

    Original languageEnglish
    Pages (from-to)962-966
    Number of pages5
    JournalApplied Surface Science
    Volume231-232
    DOIs
    Publication statusPublished - 15 Jun 2004

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