Abstract
A partially depleted absorber photodiode with graded absorption injection regions is reported. The 880-nm-thick In0.53Ga0.47As absorption region consists of a depletion layer and graded n- and p-type undepleted injection regions. Under backside illumination at 1.55-μm wavelength, an 8-μm-diameter photodiode exhibited an increase in bandwidth with increasing photocurrent. A saturation current bandwidth product of 990 mA · GHz and a responsivity of 0.67 A/W were achieved.
Original language | English |
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Pages (from-to) | 2326-2328 |
Number of pages | 3 |
Journal | IEEE Photonics Technology Letters |
Volume | 16 |
Issue number | 10 |
DOIs | |
Publication status | Published - Oct 2004 |