Accurate depth profiling through energy-dependent pulse height deficit compensation in gas ionization detectors

T. D.M. Weijers; H. Timmers; R. G. Elliman

doi:10.1016/S0168-583X(01)01310-6

Accurate depth profiling through energy-dependent pulse height deficit compensation in gas ionization detectors

T. D.M. Weijers^*, H. Timmers, R. G. Elliman

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

The impact of the pulse height deficit effect in gas ionization detectors on the accurate extraction of depth information from heavy ion elastic recoil detection spectra has been investigated. Thin GaN films and Ge_xSi_1-x/Si heterostructures have been analyzed with a 200 MeV ¹⁹⁷Au beam. Employing an empirical parameterisation of the pulse height deficit, a global energy calibration of the detector can be achieved. Energy spectra have been compared, calibrated with either a constant or a full energy-dependent compensation for the deficit. A constant compensation results in significant distortion of the extracted depth profile for heavier ions, whereas an energy-dependent compensation yields true concentration-depth profiles.

Original language	English
Pages (from-to)	397-401
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	190
Issue number	1-4
DOIs	https://doi.org/10.1016/S0168-583X(01)01310-6
Publication status	Published - May 2002

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10.1016/S0168-583X(01)01310-6

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@article{b254dba8de7d4040897228cb19d2ba98,

title = "Accurate depth profiling through energy-dependent pulse height deficit compensation in gas ionization detectors",

abstract = "The impact of the pulse height deficit effect in gas ionization detectors on the accurate extraction of depth information from heavy ion elastic recoil detection spectra has been investigated. Thin GaN films and GexSi1-x/Si heterostructures have been analyzed with a 200 MeV 197Au beam. Employing an empirical parameterisation of the pulse height deficit, a global energy calibration of the detector can be achieved. Energy spectra have been compared, calibrated with either a constant or a full energy-dependent compensation for the deficit. A constant compensation results in significant distortion of the extracted depth profile for heavier ions, whereas an energy-dependent compensation yields true concentration-depth profiles.",

keywords = "Depth profiling, Detector response, Elastic recoil detector, Gas ionization detectors, Heavy ions, Ion beam analysis",

author = "Weijers, {T. D.M.} and H. Timmers and Elliman, {R. G.}",

year = "2002",

month = may,

doi = "10.1016/S0168-583X(01)01310-6",

language = "English",

volume = "190",

pages = "397--401",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier B.V.",

number = "1-4",

}

Accurate depth profiling through energy-dependent pulse height deficit compensation in gas ionization detectors. / Weijers, T. D.M.; Timmers, H.; Elliman, R. G.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 190, No. 1-4, 05.2002, p. 397-401.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Accurate depth profiling through energy-dependent pulse height deficit compensation in gas ionization detectors

AU - Weijers, T. D.M.

AU - Timmers, H.

AU - Elliman, R. G.

PY - 2002/5

Y1 - 2002/5

N2 - The impact of the pulse height deficit effect in gas ionization detectors on the accurate extraction of depth information from heavy ion elastic recoil detection spectra has been investigated. Thin GaN films and GexSi1-x/Si heterostructures have been analyzed with a 200 MeV 197Au beam. Employing an empirical parameterisation of the pulse height deficit, a global energy calibration of the detector can be achieved. Energy spectra have been compared, calibrated with either a constant or a full energy-dependent compensation for the deficit. A constant compensation results in significant distortion of the extracted depth profile for heavier ions, whereas an energy-dependent compensation yields true concentration-depth profiles.

AB - The impact of the pulse height deficit effect in gas ionization detectors on the accurate extraction of depth information from heavy ion elastic recoil detection spectra has been investigated. Thin GaN films and GexSi1-x/Si heterostructures have been analyzed with a 200 MeV 197Au beam. Employing an empirical parameterisation of the pulse height deficit, a global energy calibration of the detector can be achieved. Energy spectra have been compared, calibrated with either a constant or a full energy-dependent compensation for the deficit. A constant compensation results in significant distortion of the extracted depth profile for heavier ions, whereas an energy-dependent compensation yields true concentration-depth profiles.

KW - Depth profiling

KW - Detector response

KW - Elastic recoil detector

KW - Gas ionization detectors

KW - Heavy ions

KW - Ion beam analysis

UR - http://www.scopus.com/inward/record.url?scp=0036570177&partnerID=8YFLogxK

U2 - 10.1016/S0168-583X(01)01310-6

DO - 10.1016/S0168-583X(01)01310-6

M3 - Article

SN - 0168-583X

VL - 190

SP - 397

EP - 401

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

IS - 1-4

ER -

Accurate depth profiling through energy-dependent pulse height deficit compensation in gas ionization detectors

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