Abstract
The thermal and electrical properties of Zn 1.25Sb 2Te 3 film have been investigated for phase change memory (PCM) applications. Compared with the conventional Ge 2Sb 2Te 5, Zn 1.25Sb 2Te 3 film exhibits a higher crystallization temperature (∼200°C), greater activation energy (2.71 eV), and better data retention of 10 years at 105°C. In addition, higher crystalline resistance and better resistance contrast are helpful to reduce RESET current and achieve a higher On/OFF ratio of PCM, respectively. Raman spectra of crystalline thin films suggests that the local bonding arrangement around Sb atoms changes; Sb 2Te 3 component is thus mainly responsible for the phase transition in Zn 1.25Sb 2Te 3 alloys.
| Original language | English |
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| Pages (from-to) | 135-138 |
| Number of pages | 4 |
| Journal | Materials Letters |
| Volume | 87 |
| DOIs | |
| Publication status | Published - 15 Nov 2012 |