An apparatus for measuring absolute electron scattering cross sections for molecular radicals

T. M. Maddern; L. R. Hargreaves; M. Bolorizadeh; M. J. Brunger; S. J. Buckman

doi:10.1088/0957-0233/19/8/085801

An apparatus for measuring absolute electron scattering cross sections for molecular radicals

T. M. Maddern, L. R. Hargreaves, M. Bolorizadeh, M. J. Brunger, S. J. Buckman

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21 Citations (Scopus)

Abstract

Electron collision cross sections for highly reactive CF_x (x = 1-3) radicals are required to model technological plasmas. In spite of their importance to industry, experimental studies of electron interactions with CF_x radicals are rarely reported in the literature. A new apparatus for measuring absolute elastic differential cross sections for molecular radicals is reported and a sample absolute cross section for the CF₂ radical is presented to demonstrate the application of this experiment.

Original language	English
Article number	085801
Journal	Measurement Science and Technology
Volume	19
Issue number	8
DOIs	https://doi.org/10.1088/0957-0233/19/8/085801
Publication status	Published - 1 Aug 2008

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keywords = "Absolute differential cross sections, Electron spectrometer, Mass spectrometer, Pyrolysis nozzle, Supersonic expansion",

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AU - Hargreaves, L. R.

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AU - Brunger, M. J.

AU - Buckman, S. J.

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N2 - Electron collision cross sections for highly reactive CFx (x = 1-3) radicals are required to model technological plasmas. In spite of their importance to industry, experimental studies of electron interactions with CFx radicals are rarely reported in the literature. A new apparatus for measuring absolute elastic differential cross sections for molecular radicals is reported and a sample absolute cross section for the CF2 radical is presented to demonstrate the application of this experiment.

AB - Electron collision cross sections for highly reactive CFx (x = 1-3) radicals are required to model technological plasmas. In spite of their importance to industry, experimental studies of electron interactions with CFx radicals are rarely reported in the literature. A new apparatus for measuring absolute elastic differential cross sections for molecular radicals is reported and a sample absolute cross section for the CF2 radical is presented to demonstrate the application of this experiment.

KW - Absolute differential cross sections

KW - Electron spectrometer

KW - Mass spectrometer

KW - Pyrolysis nozzle

KW - Supersonic expansion

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An apparatus for measuring absolute electron scattering cross sections for molecular radicals

Abstract

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