An apparatus for measuring absolute electron scattering cross sections for molecular radicals

T. M. Maddern; L. R. Hargreaves; M. Bolorizadeh; M. J. Brunger; S. J. Buckman

doi:10.1088/0957-0233/19/8/085801

An apparatus for measuring absolute electron scattering cross sections for molecular radicals

T. M. Maddern, L. R. Hargreaves, M. Bolorizadeh, M. J. Brunger, S. J. Buckman

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

Electron collision cross sections for highly reactive CF_x (x = 1-3) radicals are required to model technological plasmas. In spite of their importance to industry, experimental studies of electron interactions with CF_x radicals are rarely reported in the literature. A new apparatus for measuring absolute elastic differential cross sections for molecular radicals is reported and a sample absolute cross section for the CF₂ radical is presented to demonstrate the application of this experiment.

Original language	English
Article number	085801
Journal	Measurement Science and Technology
Volume	19
Issue number	8
DOIs	https://doi.org/10.1088/0957-0233/19/8/085801
Publication status	Published - 1 Aug 2008

Access to Document

10.1088/0957-0233/19/8/085801

Cite this

@article{94f3b8bcb2844106be3358cfe540e6e6,

title = "An apparatus for measuring absolute electron scattering cross sections for molecular radicals",

abstract = "Electron collision cross sections for highly reactive CFx (x = 1-3) radicals are required to model technological plasmas. In spite of their importance to industry, experimental studies of electron interactions with CFx radicals are rarely reported in the literature. A new apparatus for measuring absolute elastic differential cross sections for molecular radicals is reported and a sample absolute cross section for the CF2 radical is presented to demonstrate the application of this experiment.",

keywords = "Absolute differential cross sections, Electron spectrometer, Mass spectrometer, Pyrolysis nozzle, Supersonic expansion",

author = "Maddern, \{T. M.\} and Hargreaves, \{L. R.\} and M. Bolorizadeh and Brunger, \{M. J.\} and Buckman, \{S. J.\}",

year = "2008",

month = aug,

day = "1",

doi = "10.1088/0957-0233/19/8/085801",

language = "English",

volume = "19",

journal = "Measurement Science and Technology",

issn = "0957-0233",

publisher = "IOP Publishing Ltd.",

number = "8",

}

TY - JOUR

T1 - An apparatus for measuring absolute electron scattering cross sections for molecular radicals

AU - Maddern, T. M.

AU - Hargreaves, L. R.

AU - Bolorizadeh, M.

AU - Brunger, M. J.

AU - Buckman, S. J.

PY - 2008/8/1

Y1 - 2008/8/1

N2 - Electron collision cross sections for highly reactive CFx (x = 1-3) radicals are required to model technological plasmas. In spite of their importance to industry, experimental studies of electron interactions with CFx radicals are rarely reported in the literature. A new apparatus for measuring absolute elastic differential cross sections for molecular radicals is reported and a sample absolute cross section for the CF2 radical is presented to demonstrate the application of this experiment.

AB - Electron collision cross sections for highly reactive CFx (x = 1-3) radicals are required to model technological plasmas. In spite of their importance to industry, experimental studies of electron interactions with CFx radicals are rarely reported in the literature. A new apparatus for measuring absolute elastic differential cross sections for molecular radicals is reported and a sample absolute cross section for the CF2 radical is presented to demonstrate the application of this experiment.

KW - Absolute differential cross sections

KW - Electron spectrometer

KW - Mass spectrometer

KW - Pyrolysis nozzle

KW - Supersonic expansion

UR - https://www.scopus.com/pages/publications/48849093139

U2 - 10.1088/0957-0233/19/8/085801

DO - 10.1088/0957-0233/19/8/085801

M3 - Article

SN - 0957-0233

VL - 19

JO - Measurement Science and Technology

JF - Measurement Science and Technology

IS - 8

M1 - 085801

ER -

An apparatus for measuring absolute electron scattering cross sections for molecular radicals

Abstract

Access to Document

Other files and links

Fingerprint

Cite this