Analysis of multi-layer ERBS spectra

G. G. Marmitt; L. F.S. Rosa; S. K. Nandi; M. Vos

doi:10.1016/j.elspec.2015.02.009

Analysis of multi-layer ERBS spectra

G. G. Marmitt, L. F.S. Rosa, S. K. Nandi, M. Vos^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

A systematic way of analysis of multi-layer electron Rutherford backscattering spectra is described. The approach uses fitting in terms of physical meaningful parameters. Simultaneous analysis then becomes possible for spectra taken at different incoming energies and measurement geometries. Examples are given to demonstrate the level of detail that can be resolved by this technique.

Original language	English
Pages (from-to)	26-32
Number of pages	7
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	202
DOIs	https://doi.org/10.1016/j.elspec.2015.02.009
Publication status	Published - Jul 2015

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10.1016/j.elspec.2015.02.009

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@article{46f8f03595d2415b9069a47414b72ee9,

title = "Analysis of multi-layer ERBS spectra",

abstract = "A systematic way of analysis of multi-layer electron Rutherford backscattering spectra is described. The approach uses fitting in terms of physical meaningful parameters. Simultaneous analysis then becomes possible for spectra taken at different incoming energies and measurement geometries. Examples are given to demonstrate the level of detail that can be resolved by this technique.",

keywords = "Depth profiling, Electron rutherford backscattering, Surface analysis",

author = "Marmitt, {G. G.} and Rosa, {L. F.S.} and Nandi, {S. K.} and M. Vos",

year = "2015",

month = jul,

doi = "10.1016/j.elspec.2015.02.009",

language = "English",

volume = "202",

pages = "26--32",

journal = "Journal of Electron Spectroscopy and Related Phenomena",

issn = "0368-2048",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Analysis of multi-layer ERBS spectra

AU - Marmitt, G. G.

AU - Rosa, L. F.S.

AU - Nandi, S. K.

AU - Vos, M.

PY - 2015/7

Y1 - 2015/7

N2 - A systematic way of analysis of multi-layer electron Rutherford backscattering spectra is described. The approach uses fitting in terms of physical meaningful parameters. Simultaneous analysis then becomes possible for spectra taken at different incoming energies and measurement geometries. Examples are given to demonstrate the level of detail that can be resolved by this technique.

AB - A systematic way of analysis of multi-layer electron Rutherford backscattering spectra is described. The approach uses fitting in terms of physical meaningful parameters. Simultaneous analysis then becomes possible for spectra taken at different incoming energies and measurement geometries. Examples are given to demonstrate the level of detail that can be resolved by this technique.

KW - Depth profiling

KW - Electron rutherford backscattering

KW - Surface analysis

UR - http://www.scopus.com/inward/record.url?scp=84924359014&partnerID=8YFLogxK

U2 - 10.1016/j.elspec.2015.02.009

DO - 10.1016/j.elspec.2015.02.009

M3 - Article

SN - 0368-2048

VL - 202

SP - 26

EP - 32

JO - Journal of Electron Spectroscopy and Related Phenomena

JF - Journal of Electron Spectroscopy and Related Phenomena

ER -

Analysis of multi-layer ERBS spectra

Abstract

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