Abstract
We report optical property changes in mid-infrared ultra-high-Q on-chip resonators due to nanometer-thick Al2O3 and TiO2 passivation films. Despite resistance to degradation, absorption losses were observed because of internal impurities and altered surface chemistry.
| Original language | English |
|---|---|
| Publication status | Published - 2024 |
| Event | 2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 - Incheon, Korea, Republic of Duration: 4 Aug 2024 → 8 Aug 2024 |
Conference
| Conference | 2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 |
|---|---|
| Country/Territory | Korea, Republic of |
| City | Incheon |
| Period | 4/08/24 → 8/08/24 |
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