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Analysis of Optical Properties of Thin Passivation Layers Using Ultra-High-Q Mid-IR Microresonators

Daewon Suk, Kiyoung Ko, Jingyu Kim, Sang Hee Ko Park, Rongping Wang, Duk Yong Choi*, Hansuek Lee

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

Abstract

We report optical property changes in mid-infrared ultra-high-Q on-chip resonators due to nanometer-thick Al2O3 and TiO2 passivation films. Despite resistance to degradation, absorption losses were observed because of internal impurities and altered surface chemistry.

Original languageEnglish
Publication statusPublished - 2024
Event2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 - Incheon, Korea, Republic of
Duration: 4 Aug 20248 Aug 2024

Conference

Conference2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024
Country/TerritoryKorea, Republic of
CityIncheon
Period4/08/248/08/24

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