Boron diffusion in amorphous germanium

L. A. Edelman, K. S. Jones, R. G. Elliman, L. M. Rubin

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Rapid boron diffusion in amorphous germanium is observed during solid phase epitaxial regrowth. Boron diffusion in amorphous germanium is seen to increase approximately 4 orders of magnitude relative to amorphous silicon. Weak bonding between germanium and boron coupled with a distinct dopant profile indicate a different diffusion mechanism than that of boron in amorphous silicon.

Original languageEnglish
Title of host publicationIon Implantation Technology 2008 - 17th International Conference on Ion Implantation Technology, IIT 2008
EditorsEdmund G. Seebauer, Amitabh Jain, Yevgeniy V. Kondratenko, Susan B. Felch
PublisherAmerican Institute of Physics Inc.
Pages225-227
Number of pages3
ISBN (Electronic)9780735405974
DOIs
Publication statusPublished - 2008
Event17th International Conference on Ion Implantation Technology, IIT 2008 - Monterey, United States
Duration: 8 Jun 200813 Jun 2008

Publication series

NameAIP Conference Proceedings
Volume1066
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

Conference17th International Conference on Ion Implantation Technology, IIT 2008
Country/TerritoryUnited States
CityMonterey
Period8/06/0813/06/08

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