TY - JOUR
T1 - Bottom-up, Chip-Scale Engineering of Low Threshold, Multi-Quantum-Well Microring Lasers
AU - Wong, Wei Wen
AU - Wang, Naiyin
AU - Esser, Bryan D.
AU - Church, Stephen A.
AU - Li, Li
AU - Lockrey, Mark
AU - Aharonovich, Igor
AU - Parkinson, Patrick
AU - Etheridge, Joanne
AU - Jagadish, Chennupati
AU - Tan, Hark Hoe
N1 - Publisher Copyright:
© 2023 American Chemical Society
PY - 2023/8/8
Y1 - 2023/8/8
N2 - Integrated, on-chip lasers are vital building blocks in future optoelectronic and nanophotonic circuitry. Specifically, III-V materials that are of technological relevance have attracted considerable attention. However, traditional microcavity laser fabrication techniques, including top-down etching and bottom-up catalytic growth, often result in undesirable cavity geometries with poor scalability and reproducibility. Here, we utilize the selective area epitaxy method to deterministically engineer thousands of microring lasers on a single chip. Specifically, we realize a catalyst-free, epitaxial growth of a technologically critical material, InAsP/InP, in a ring-like cavity with embedded multi-quantum-well heterostructures. We elucidate a detailed growth mechanism and leverage the capability to deterministically control the adatom diffusion lengths on selected crystal facets to reproducibly achieve ultrasmooth cavity sidewalls. The engineered devices exhibit a tunable emission wavelength in the telecommunication O-band and show low-threshold lasing with over 80% device efficacy across the chip. Our work marks a significant milestone toward the implementation of a fully integrated III-V materials platform for next-generation high-density integrated photonic and optoelectronic circuits.
AB - Integrated, on-chip lasers are vital building blocks in future optoelectronic and nanophotonic circuitry. Specifically, III-V materials that are of technological relevance have attracted considerable attention. However, traditional microcavity laser fabrication techniques, including top-down etching and bottom-up catalytic growth, often result in undesirable cavity geometries with poor scalability and reproducibility. Here, we utilize the selective area epitaxy method to deterministically engineer thousands of microring lasers on a single chip. Specifically, we realize a catalyst-free, epitaxial growth of a technologically critical material, InAsP/InP, in a ring-like cavity with embedded multi-quantum-well heterostructures. We elucidate a detailed growth mechanism and leverage the capability to deterministically control the adatom diffusion lengths on selected crystal facets to reproducibly achieve ultrasmooth cavity sidewalls. The engineered devices exhibit a tunable emission wavelength in the telecommunication O-band and show low-threshold lasing with over 80% device efficacy across the chip. Our work marks a significant milestone toward the implementation of a fully integrated III-V materials platform for next-generation high-density integrated photonic and optoelectronic circuits.
KW - III−V microring lasers
KW - III−V quantum well lasers
KW - integrated photonics
KW - selective area epitaxy
KW - whispering-gallery mode lasers
UR - http://www.scopus.com/inward/record.url?scp=85166759530&partnerID=8YFLogxK
U2 - 10.1021/acsnano.3c04234
DO - 10.1021/acsnano.3c04234
M3 - Article
SN - 1936-0851
VL - 17
SP - 15065
EP - 15076
JO - ACS Nano
JF - ACS Nano
IS - 15
ER -