Breakdown behavior in radio-frequency argon discharges

H. B. Smith; C. Charles; R. W. Boswell

doi:10.1063/1.1531615

Breakdown behavior in radio-frequency argon discharges

H. B. Smith^*, C. Charles, R. W. Boswell

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

77 Citations (Scopus)

Abstract

The radio-frequency breakdown in argon gas was investigated by using particle-in-cell simulation technique. A zero-dimensional global model was developed to study the experimental and simulated measurements of breakdown. It was found that the simulation results were in agreement with respect to the experimental results.

Original language	English
Pages (from-to)	875-881
Number of pages	7
Journal	Physics of Plasmas
Volume	10
Issue number	3
DOIs	https://doi.org/10.1063/1.1531615
Publication status	Published - Mar 2003

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title = "Breakdown behavior in radio-frequency argon discharges",

abstract = "The radio-frequency breakdown in argon gas was investigated by using particle-in-cell simulation technique. A zero-dimensional global model was developed to study the experimental and simulated measurements of breakdown. It was found that the simulation results were in agreement with respect to the experimental results.",

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AB - The radio-frequency breakdown in argon gas was investigated by using particle-in-cell simulation technique. A zero-dimensional global model was developed to study the experimental and simulated measurements of breakdown. It was found that the simulation results were in agreement with respect to the experimental results.

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DO - 10.1063/1.1531615

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JO - Physics of Plasmas

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ER -

Breakdown behavior in radio-frequency argon discharges

Abstract

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