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Clusterization of vacancy defects in ZnO irradiated with 2 MeV O +

  • A. Zubiaga*
  • , F. Tuomisto
  • , V. A. Coleman
  • , C. Jagadish
  • *Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    6 Citations (Scopus)

    Abstract

    Slow positrons have been used to study ZnO layers grown on a-axis sapphire and irradiated by 2 MeV O + ions to fluences from 10 12 cm -2 to 10 17 cm -2 . At low fluences Zn vacancies are observed, and their introduction rate is estimated as 2000 cm -1 . At the highest fluences of 10 16 -10 17 cm -2 vacancy clusters are formed. The extent of the primary damage and its recovery is discussed.

    Original languageEnglish
    Pages (from-to)234-236
    Number of pages3
    JournalApplied Surface Science
    Volume255
    Issue number1
    DOIs
    Publication statusPublished - 31 Oct 2008

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