Abstract
Slow positrons have been used to study ZnO layers grown on a-axis sapphire and irradiated by 2 MeV O + ions to fluences from 10 12 cm -2 to 10 17 cm -2 . At low fluences Zn vacancies are observed, and their introduction rate is estimated as 2000 cm -1 . At the highest fluences of 10 16 -10 17 cm -2 vacancy clusters are formed. The extent of the primary damage and its recovery is discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 234-236 |
| Number of pages | 3 |
| Journal | Applied Surface Science |
| Volume | 255 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 31 Oct 2008 |