CMOS compatible fabrication of micro, nano convex silicon lens arrays by conformal chemical vapor deposition

Engineering

• Chemical Vapor Deposition 100%
• Vapor Deposition 100%
• Nanometre 50%
• Experimental Measurement 50%
• Hydrogenated Amorphous Silicon 50%
• Computer Simulation 50%
• Fabrication Technique 50%
• Electron Optical Lithography 50%
• High Packing Density 50%
• Feasible Solution 50%

Material Science

• Silicon 100%
• Chemical Vapor Deposition 100%
• Optical Device 25%
• Density 25%
• Amorphous Silicon 25%
• Optical Imaging 25%
• Lithography 25%
• Surface Roughness 25%
• Plasma Etching 25%