Comparison between experiment and two simulation strategies for the extraction of focused ion beams

Orson Sutherland; John Keller; Michael Irzyk; Rod Boswell

doi:10.1063/1.1753669

Comparison between experiment and two simulation strategies for the extraction of focused ion beams

Orson Sutherland^*, John Keller, Michael Irzyk, Rod Boswell

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

A typical ray-tracing code, PBgun, was compared to a particle-in-cell (PIC) code called simulation d'extraction de faisceaux d'ions (SEFI) and a single aperture, three electrode extraction experiment. Medium current extraction from a high density plasma source with a three electrode extraction system was described. It was shown that SEFI could accurately predict the function of extracted current versus extraction voltage and that PBgun gave accurate simulations when the current or current density could be specified near the meniscus. It was found that both codes had some error from beam crossing near the axis which changed the amount of meniscus curvature predicted.

Original language	English
Pages (from-to)	2379-2386
Number of pages	8
Journal	Review of Scientific Instruments
Volume	75
Issue number	7
DOIs	https://doi.org/10.1063/1.1753669
Publication status	Published - Jul 2004

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abstract = "A typical ray-tracing code, PBgun, was compared to a particle-in-cell (PIC) code called simulation d'extraction de faisceaux d'ions (SEFI) and a single aperture, three electrode extraction experiment. Medium current extraction from a high density plasma source with a three electrode extraction system was described. It was shown that SEFI could accurately predict the function of extracted current versus extraction voltage and that PBgun gave accurate simulations when the current or current density could be specified near the meniscus. It was found that both codes had some error from beam crossing near the axis which changed the amount of meniscus curvature predicted.",

author = "Orson Sutherland and John Keller and Michael Irzyk and Rod Boswell",

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AU - Irzyk, Michael

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Comparison between experiment and two simulation strategies for the extraction of focused ion beams

Abstract

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