Compensation of motion coupling effect in AFM imaging

Md Sohel Rana*, Hemanshu R. Pota, Ian R. Petersen

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    Abstract

    The acquisition of a high-quality imaging performance by an atomic force microscope is significantly influenced by the motion coupling effect of its key scanning unit, i.e. its piezoelectric tube scanner. In this Letter, to improve its performance, a MIMO model predictive control scheme for reducing this effect is proposed. The proposed controller achieves this by greatly overcoming the problem of tilted characters in the atomic force microscopy (AFM) scanned images. The experimental results are demonstrating the effectiveness of the proposed control technique.

    Original languageEnglish
    Pages (from-to)863-865
    Number of pages3
    JournalMicro and Nano Letters
    Volume15
    Issue number12
    DOIs
    Publication statusPublished - 2020

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