Contactless determination of the carrier mobility sum in silicon wafers using combined photoluminescence and photoconductance measurements

Ziv Hameiri; Fiacre Rougieux; Ron Sinton; Thorsten Trupke

doi:10.1063/1.4865804

Contactless determination of the carrier mobility sum in silicon wafers using combined photoluminescence and photoconductance measurements

Ziv Hameiri, Fiacre Rougieux, Ron Sinton, Thorsten Trupke

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

A contactless method to determine the carrier mobility sum in silicon wafers, based on a comparison between photoluminescence and photoconductance measurements is presented. The method is applied to monocrystalline silicon wafers and the results are found to be in good agreement with well-established mobility models and another measurement method. The potential of the proposed method to determine the carrier mobility sum of multicrystalline and compensated silicon wafers is then demonstrated.

Original language	English
Article number	073506
Journal	Applied Physics Letters
Volume	104
Issue number	7
DOIs	https://doi.org/10.1063/1.4865804
Publication status	Published - 17 Feb 2014

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abstract = "A contactless method to determine the carrier mobility sum in silicon wafers, based on a comparison between photoluminescence and photoconductance measurements is presented. The method is applied to monocrystalline silicon wafers and the results are found to be in good agreement with well-established mobility models and another measurement method. The potential of the proposed method to determine the carrier mobility sum of multicrystalline and compensated silicon wafers is then demonstrated.",

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AU - Hameiri, Ziv

AU - Rougieux, Fiacre

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AU - Trupke, Thorsten

PY - 2014/2/17

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N2 - A contactless method to determine the carrier mobility sum in silicon wafers, based on a comparison between photoluminescence and photoconductance measurements is presented. The method is applied to monocrystalline silicon wafers and the results are found to be in good agreement with well-established mobility models and another measurement method. The potential of the proposed method to determine the carrier mobility sum of multicrystalline and compensated silicon wafers is then demonstrated.

AB - A contactless method to determine the carrier mobility sum in silicon wafers, based on a comparison between photoluminescence and photoconductance measurements is presented. The method is applied to monocrystalline silicon wafers and the results are found to be in good agreement with well-established mobility models and another measurement method. The potential of the proposed method to determine the carrier mobility sum of multicrystalline and compensated silicon wafers is then demonstrated.

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Contactless determination of the carrier mobility sum in silicon wafers using combined photoluminescence and photoconductance measurements

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