@inproceedings{57348a0f7db94dce90b69dc96b977c62,
title = "Cross-coupling effect compensation of an AFM piezoelectric tube scanner for improved nanopositioning",
abstract = "The imaging performance of an atomic force microscope (AFM) at high scanning speeds is limited due to the cross-coupling properties of its scanning unit; i.e., the piezoelectric tube scanner (PTS). In order to increase the imaging speed of an AFM, a multi-input multi-output (MIMO) model predictive control (MPC) scheme is used for the PTS to reduce its cross-coupling effect. The design of this controller is based on an identified MIMO model of the AFM PTS. Also, a damping compensator is designed and included in the feedback loop with the plant to suppress the vibration of the PTS at the resonant frequency. Experimental results confirm the efficacy of the proposed controller.",
keywords = "Mechanical systems/robotics, Nano systems, Smart structures",
author = "Rana, {M. S.} and Pota, {H. R.} and Petersen, {I. R.}",
year = "2014",
doi = "10.1109/ACC.2014.6859357",
language = "English",
isbn = "9781479932726",
series = "Proceedings of the American Control Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "2456--2461",
booktitle = "2014 American Control Conference, ACC 2014",
address = "United States",
note = "2014 American Control Conference, ACC 2014 ; Conference date: 04-06-2014 Through 06-06-2014",
}