Crystal structure of laser-induced subsurface modifications in Si

P. C. Verburg*, L. A. Smillie, G. R.B.E. Römer, B. Haberl, J. E. Bradby, J. S. Williams, A. J. Huis in ’t Veld

*Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

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