Crystallization behaviors of ZnxSb100-x thin films for ultralong data retention phase change memory applications

Yimin Chen, Guoxiang Wang, Xiang Shen, Tiefeng Xu, R. P. Wang, Liangcai Wu, Yegang Lu, Junjian Li, Shixun Dai, Qiuhua Nie

    Research output: Contribution to journalArticlepeer-review

    59 Citations (Scopus)

    Abstract

    ZnxSb100-x films with low Zn content are crystallized in a single-step process with Sb, while the film (Zn/Sb ratio is about 1:1) exhibits a two-step crystallization process with ZnSb metastable and stable phases. Importantly, ZnSb films have higher crystallization temperature (~257 °C), larger crystalline activation energy (~5.63 eV), better 10 year-data-retention (~201 °C) and lower melting temperature (~500 °C).

    Original languageEnglish
    Pages (from-to)757-762
    Number of pages6
    JournalCrystEngComm
    Volume16
    Issue number5
    DOIs
    Publication statusPublished - 7 Feb 2014

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