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Crystallization behaviors of ZnxSb100-x thin films for ultralong data retention phase change memory applications

  • Yimin Chen
  • , Guoxiang Wang
  • , Xiang Shen
  • , Tiefeng Xu
  • , R. P. Wang
  • , Liangcai Wu
  • , Yegang Lu
  • , Junjian Li
  • , Shixun Dai
  • , Qiuhua Nie

    Research output: Contribution to journal › Article › peer-review

    64 Citations (Scopus)

    Abstract

    ZnxSb100-x films with low Zn content are crystallized in a single-step process with Sb, while the film (Zn/Sb ratio is about 1:1) exhibits a two-step crystallization process with ZnSb metastable and stable phases. Importantly, ZnSb films have higher crystallization temperature (~257 °C), larger crystalline activation energy (~5.63 eV), better 10 year-data-retention (~201 °C) and lower melting temperature (~500 °C).

    Original languageEnglish
    Pages (from-to)757-762
    Number of pages6
    JournalCrystEngComm
    Volume16
    Issue number5
    DOIs
    Publication statusPublished - 7 Feb 2014

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