Current-free double-layer formation in a high-density helicon discharge

Christine Charles; Rod Boswell

doi:10.1063/1.1557319

Current-free double-layer formation in a high-density helicon discharge

Christine Charles^*, Rod Boswell

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

274 Citations (Scopus)

Abstract

Current-free double-layer formation in a high-density helicon discharge was experimentally demonstrated. A horizontal helicon system which consisted of a 15-cm-diameter helicon¹⁷ source was attached contiguously to a 32-cm-diam earthed aluminum diffusion chamber. The end plate of the diffusion chamber was equipped with an axially movable, retarding field energy analyzer and a Langmuir probe. A current-free, electric double layer with eφ/kT_e∼3 and a thickness of less than 50 debye lengths was observed in an expanding high-density helicon sustained radio frequency (13.56-MHz) discharge.

Original language	English
Pages (from-to)	1356-1358
Number of pages	3
Journal	Applied Physics Letters
Volume	82
Issue number	9
DOIs	https://doi.org/10.1063/1.1557319
Publication status	Published - 3 Mar 2003

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abstract = "Current-free double-layer formation in a high-density helicon discharge was experimentally demonstrated. A horizontal helicon system which consisted of a 15-cm-diameter helicon17 source was attached contiguously to a 32-cm-diam earthed aluminum diffusion chamber. The end plate of the diffusion chamber was equipped with an axially movable, retarding field energy analyzer and a Langmuir probe. A current-free, electric double layer with eφ/kTe∼3 and a thickness of less than 50 debye lengths was observed in an expanding high-density helicon sustained radio frequency (13.56-MHz) discharge.",

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AU - Boswell, Rod

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AB - Current-free double-layer formation in a high-density helicon discharge was experimentally demonstrated. A horizontal helicon system which consisted of a 15-cm-diameter helicon17 source was attached contiguously to a 32-cm-diam earthed aluminum diffusion chamber. The end plate of the diffusion chamber was equipped with an axially movable, retarding field energy analyzer and a Langmuir probe. A current-free, electric double layer with eφ/kTe∼3 and a thickness of less than 50 debye lengths was observed in an expanding high-density helicon sustained radio frequency (13.56-MHz) discharge.

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VL - 82

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 9

ER -

Current-free double-layer formation in a high-density helicon discharge

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