@inbook{1edda54a4be24042a9a39f461c1ce71e,
title = "Damage formation, amorphization and crystallization in semiconductors at elevated temperatures",
abstract = "This chapter focusses on damage build up, amorphization and crystallization processes in a range of semiconductors under irradiation conditions close to the critical temperature for amorphization where small changes in ion fluence, ion flux, ion mass and irradiation temperature have a strong effect on the damage level and nature of the residual disorder. Layer-by-layer amorphization (IBIIA) and ion-beam-induced epitaxial crystallization (IBIEC) phenomena are also highlighted as well as anomalous processes such as ion-induced swelling, porosity and surface erosion.",
author = "Williams, {James S.}",
note = "Publisher Copyright: {\textcopyright} Springer International Publishing Switzerland 2016.",
year = "2016",
doi = "10.1007/978-3-319-33561-2_6",
language = "English",
series = "Springer Series in Surface Sciences",
publisher = "Springer Verlag",
pages = "243--285",
booktitle = "Springer Series in Surface Sciences",
address = "Germany",
}