Defect generation concomitant with plasma nitridation to Si/SiO2 stacks at room temperature

Hao Jin, Klaus Weber, Paul Smith, Andrew Blakers

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Conference of the Australia and New Zealand Solar Energy Society (Solar 2006)
    EditorsConference Program Committee
    Place of PublicationCanberra Australia
    PublisherAustralian and New Zealand Solar Energy Society (ANZSES)
    EditionPeer Reviewed
    ISBN (Print)0975065041
    Publication statusPublished - 2006
    EventAustralia and New Zealand Solar Energy Society Conference (Solar 2006) - Canberra Australia, Australia
    Duration: 1 Jan 2006 → …
    http://www.anzses.org

    Conference

    ConferenceAustralia and New Zealand Solar Energy Society Conference (Solar 2006)
    Country/TerritoryAustralia
    Period1/01/06 → …
    OtherSeptember 13-15 2006
    Internet address

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