Defect generation concomitant with plasma nitridation to Si/SiO2 stacks at room temperature

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › peer-review

Original language	English
Title of host publication	Proceedings of the Conference of the Australia and New Zealand Solar Energy Society (Solar 2006)
Editors	Conference Program Committee
Place of Publication	Canberra Australia
Publisher	Australian and New Zealand Solar Energy Society (ANZSES)
Edition	Peer Reviewed
ISBN (Print)	0975065041
Publication status	Published - 2006
Event	Australia and New Zealand Solar Energy Society Conference (Solar 2006) - Canberra Australia, Australia Duration: 1 Jan 2006 → … http://www.anzses.org

Conference	Australia and New Zealand Solar Energy Society Conference (Solar 2006)
Country/Territory	Australia
Period	1/01/06 → …
Other	September 13-15 2006
Internet address	http://www.anzses.org

Cite this

Jin, Hao ; Weber, Klaus ; Smith, Paul et al. / Defect generation concomitant with plasma nitridation to Si/SiO2 stacks at room temperature. Proceedings of the Conference of the Australia and New Zealand Solar Energy Society (Solar 2006). editor / Conference Program Committee. Peer Reviewed. ed. Canberra Australia : Australian and New Zealand Solar Energy Society (ANZSES), 2006.

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title = "Defect generation concomitant with plasma nitridation to Si/SiO2 stacks at room temperature",

author = "Hao Jin and Klaus Weber and Paul Smith and Andrew Blakers",

year = "2006",

language = "English",

isbn = "0975065041",

editor = "{Conference Program Committee}",

booktitle = "Proceedings of the Conference of the Australia and New Zealand Solar Energy Society (Solar 2006)",

publisher = "Australian and New Zealand Solar Energy Society (ANZSES)",

edition = "Peer Reviewed",

note = "Australia and New Zealand Solar Energy Society Conference (Solar 2006) ; Conference date: 01-01-2006",

url = "http://www.anzses.org ",

}

Jin, H, Weber, K, Smith, P & Blakers, A 2006, Defect generation concomitant with plasma nitridation to Si/SiO2 stacks at room temperature. in CPC (ed.), Proceedings of the Conference of the Australia and New Zealand Solar Energy Society (Solar 2006). Peer Reviewed edn, Australian and New Zealand Solar Energy Society (ANZSES), Canberra Australia, Australia and New Zealand Solar Energy Society Conference (Solar 2006), Australia, 1/01/06.

Defect generation concomitant with plasma nitridation to Si/SiO2 stacks at room temperature. / Jin, Hao; Weber, Klaus; Smith, Paul et al.
Proceedings of the Conference of the Australia and New Zealand Solar Energy Society (Solar 2006). ed. / Conference Program Committee. Peer Reviewed. ed. Canberra Australia: Australian and New Zealand Solar Energy Society (ANZSES), 2006.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › peer-review

TY - GEN

T1 - Defect generation concomitant with plasma nitridation to Si/SiO2 stacks at room temperature

AU - Jin, Hao

AU - Weber, Klaus

AU - Smith, Paul

AU - Blakers, Andrew

PY - 2006

Y1 - 2006

M3 - Conference Paper

SN - 0975065041

BT - Proceedings of the Conference of the Australia and New Zealand Solar Energy Society (Solar 2006)

A2 - null, Conference Program Committee

PB - Australian and New Zealand Solar Energy Society (ANZSES)

CY - Canberra Australia

T2 - Australia and New Zealand Solar Energy Society Conference (Solar 2006)

Y2 - 1 January 2006

ER -