Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure

Wensheng Liang, Dong Chul Suh, Jun X Yu, James Bullock, Klaus Weber

    Research output: Contribution to journalArticlepeer-review

    Fingerprint

    Dive into the research topics of 'Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure'. Together they form a unique fingerprint.

    Material Science

    Engineering