Density limit in helicon discharges

David G. Miljak; Francis F. Chen

doi:10.1088/0963-0252/7/4/011

Density limit in helicon discharges

David G. Miljak^*, Francis F. Chen

^*Corresponding author for this work

Research School of Physics

Research output: Contribution to journal › Article › peer-review

45 Citations (SciVal)

Abstract

To produce the highest possible density in a helicon discharge, two helical antennas were used to launch m = +1 waves colliding at the midplane. With 2 kW of RF power on each antenna, a maximum plasma density of 8 × 10¹³ cm^-3 was achieved, not much higher than with a single antenna. This density limit is explained by gas depletion, and a method to avoid this is suggested.

Original language	English
Pages (from-to)	537-549
Number of pages	13
Journal	Plasma Sources Science and Technology
Volume	7
Issue number	4
DOIs	https://doi.org/10.1088/0963-0252/7/4/011
Publication status	Published - Nov 1998

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title = "Density limit in helicon discharges",

abstract = "To produce the highest possible density in a helicon discharge, two helical antennas were used to launch m = +1 waves colliding at the midplane. With 2 kW of RF power on each antenna, a maximum plasma density of 8 × 1013 cm-3 was achieved, not much higher than with a single antenna. This density limit is explained by gas depletion, and a method to avoid this is suggested.",

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AU - Chen, Francis F.

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N2 - To produce the highest possible density in a helicon discharge, two helical antennas were used to launch m = +1 waves colliding at the midplane. With 2 kW of RF power on each antenna, a maximum plasma density of 8 × 1013 cm-3 was achieved, not much higher than with a single antenna. This density limit is explained by gas depletion, and a method to avoid this is suggested.

AB - To produce the highest possible density in a helicon discharge, two helical antennas were used to launch m = +1 waves colliding at the midplane. With 2 kW of RF power on each antenna, a maximum plasma density of 8 × 1013 cm-3 was achieved, not much higher than with a single antenna. This density limit is explained by gas depletion, and a method to avoid this is suggested.

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DO - 10.1088/0963-0252/7/4/011

M3 - Article

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VL - 7

SP - 537

EP - 549

JO - Plasma Sources Science and Technology

JF - Plasma Sources Science and Technology

IS - 4

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Density limit in helicon discharges

Abstract

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