Abstract
This paper describes how capacitance-voltage (CV) and Kelvin probe (KP) measurements can be combined to determine the magnitude and centroid of the electric charge in a thin-film insulator. The technique is demonstrated on three films of relevance to silicon solar cells: aluminium oxide, amorphous silicon nitride and silicon dioxide. Since the charge within these films is of different magnitudes, locations and polarity, they offer a good selection with which to demonstrate the combined CV and KP technique.
Original language | English |
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Pages (from-to) | 162-170 |
Number of pages | 9 |
Journal | Energy Procedia |
Volume | 15 |
DOIs | |
Publication status | Published - 2012 |
Event | 6th International Conference on Materials for Advanced Technologies, ICMAT 2011 - Singapore, Singapore Duration: 26 Jun 2011 → 1 Jul 2011 |