Development of a new high-current triode extraction system for helicon ion source: Design and simulation

M. Khoshhal; M. Habibi; Rod W. Boswell

doi:10.1017/S0263034618000526

Development of a new high-current triode extraction system for helicon ion source: Design and simulation

M. Khoshhal, M. Habibi^*, Rod W. Boswell

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Three triode extraction systems are simulated by IBSimu ion optical code for Amirkabir Helicon Ion Source (AHIS). The optimized pierce and suggested parabolic electrodes are introduced for the first time in this paper. The obtained N ⁺ beam for parabolic geometry designed for ion implantation has 66 keV energy, and 10.4 mA current. Ion beam emittance and Twiss parameters of the emittance ellipse as the function of x term index are calculated for parabolic electrode equation. The simulated triode extraction systems have been evaluated by using of optimized parameters such as the extraction voltage, gap distance, plasma electrode (PE) aperture, and ion temperature. The extraction voltage, gap distance, PE aperture, and ion temperature have been changed in the range of 58-70 kV, 35-39 mm, 4-6 mm, and 0.5-4.4 eV in the simulations, respectively.

Original language	English
Pages (from-to)	477-486
Number of pages	10
Journal	Laser and Particle Beams
Volume	36
Issue number	4
DOIs	https://doi.org/10.1017/S0263034618000526
Publication status	Published - 1 Dec 2018

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title = "Development of a new high-current triode extraction system for helicon ion source: Design and simulation",

abstract = " Three triode extraction systems are simulated by IBSimu ion optical code for Amirkabir Helicon Ion Source (AHIS). The optimized pierce and suggested parabolic electrodes are introduced for the first time in this paper. The obtained N + beam for parabolic geometry designed for ion implantation has 66 keV energy, and 10.4 mA current. Ion beam emittance and Twiss parameters of the emittance ellipse as the function of x term index are calculated for parabolic electrode equation. The simulated triode extraction systems have been evaluated by using of optimized parameters such as the extraction voltage, gap distance, plasma electrode (PE) aperture, and ion temperature. The extraction voltage, gap distance, PE aperture, and ion temperature have been changed in the range of 58-70 kV, 35-39 mm, 4-6 mm, and 0.5-4.4 eV in the simulations, respectively.",

keywords = "Extraction ion beam, IBSimu code, helicon ion source",

author = "M. Khoshhal and M. Habibi and Boswell, {Rod W.}",

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T1 - Development of a new high-current triode extraction system for helicon ion source

T2 - Design and simulation

AU - Khoshhal, M.

AU - Habibi, M.

AU - Boswell, Rod W.

PY - 2018/12/1

Y1 - 2018/12/1

N2 - Three triode extraction systems are simulated by IBSimu ion optical code for Amirkabir Helicon Ion Source (AHIS). The optimized pierce and suggested parabolic electrodes are introduced for the first time in this paper. The obtained N + beam for parabolic geometry designed for ion implantation has 66 keV energy, and 10.4 mA current. Ion beam emittance and Twiss parameters of the emittance ellipse as the function of x term index are calculated for parabolic electrode equation. The simulated triode extraction systems have been evaluated by using of optimized parameters such as the extraction voltage, gap distance, plasma electrode (PE) aperture, and ion temperature. The extraction voltage, gap distance, PE aperture, and ion temperature have been changed in the range of 58-70 kV, 35-39 mm, 4-6 mm, and 0.5-4.4 eV in the simulations, respectively.

AB - Three triode extraction systems are simulated by IBSimu ion optical code for Amirkabir Helicon Ion Source (AHIS). The optimized pierce and suggested parabolic electrodes are introduced for the first time in this paper. The obtained N + beam for parabolic geometry designed for ion implantation has 66 keV energy, and 10.4 mA current. Ion beam emittance and Twiss parameters of the emittance ellipse as the function of x term index are calculated for parabolic electrode equation. The simulated triode extraction systems have been evaluated by using of optimized parameters such as the extraction voltage, gap distance, plasma electrode (PE) aperture, and ion temperature. The extraction voltage, gap distance, PE aperture, and ion temperature have been changed in the range of 58-70 kV, 35-39 mm, 4-6 mm, and 0.5-4.4 eV in the simulations, respectively.

KW - Extraction ion beam

KW - IBSimu code

KW - helicon ion source

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U2 - 10.1017/S0263034618000526

DO - 10.1017/S0263034618000526

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VL - 36

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EP - 486

JO - Laser and Particle Beams

JF - Laser and Particle Beams

IS - 4

ER -

Development of a new high-current triode extraction system for helicon ion source: Design and simulation

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