Direct comparison of boron, phosphorus, and aluminum gettering of iron in crystalline silicon

This paper presents a direct quantitative comparison of the effectiveness of boron diffusion, phosphorus diffusion, and aluminum alloying in removing interstitial iron in crystalline silicon in the context of silicon solar cells. Phosphorus diffusion gettering was effective in removing more than 90% of the interstitial iron across a range of diffusion temperatures, sheet resistances, and iron doses. Even relatively light phosphorus diffusions (145 δ) were found to give very effective gettering, especially when combined with extended low temperature annealing. Aluminum alloying was extremely effective and removed more than 99 of the implanted iron for a range of alloying temperatures and aluminum film thicknesses. In contrast, our experimental results showed that boron diffusion gettering is very sensitive to the deposition conditions and can change from less than 5 of the Fe being gettered to more than 99.9 gettered by changing only the gas flow ratios and the post-oxidation step.