Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp

Ting Han; Steve Madden; Douglas Bulla; Sukanta Debbarma; Barry Luther-Davies

doi:10.1109/CLEOE.2011.5943254

Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp

Ting Han^*, Steve Madden, Douglas Bulla, Sukanta Debbarma, Barry Luther-Davies

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

In this paper, we report the first thermal nano-imprint fabrication of low loss As₂S₃ Chalocgenide glass waveguides. As ₂S₃ rib waveguides 2-4m wide and 1m high with losses below 0.5dB/cm at 1550nm were thermally embossed by a soft stamp made from Polydimethylsiloxane (PDMS) on a 100mm wafer scale.

Original language	English
Title of host publication	2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011
DOIs	https://doi.org/10.1109/CLEOE.2011.5943254
Publication status	Published - 2011
Event	2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011 - Munich, Germany Duration: 22 May 2011 → 26 May 2011

Publication series

Name	2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011

Conference

Conference	2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011
Country/Territory	Germany
City	Munich
Period	22/05/11 → 26/05/11

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10.1109/CLEOE.2011.5943254

Cite this

Han, T., Madden, S., Bulla, D., Debbarma, S., & Luther-Davies, B. (2011). Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp. In 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011 Article 5943254 (2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011). https://doi.org/10.1109/CLEOE.2011.5943254

Han, Ting ; Madden, Steve ; Bulla, Douglas et al. / Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp. 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011. 2011. (2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011).

@inproceedings{1782ea8fc204402e85c7af7e81ae6f64,

title = "Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp",

abstract = "In this paper, we report the first thermal nano-imprint fabrication of low loss As2S3 Chalocgenide glass waveguides. As 2S3 rib waveguides 2-4m wide and 1m high with losses below 0.5dB/cm at 1550nm were thermally embossed by a soft stamp made from Polydimethylsiloxane (PDMS) on a 100mm wafer scale.",

author = "Ting Han and Steve Madden and Douglas Bulla and Sukanta Debbarma and Barry Luther-Davies",

year = "2011",

doi = "10.1109/CLEOE.2011.5943254",

language = "English",

isbn = "9781457705335",

series = "2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011",

booktitle = "2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011",

note = "2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011 ; Conference date: 22-05-2011 Through 26-05-2011",

}

Han, T, Madden, S, Bulla, D, Debbarma, S & Luther-Davies, B 2011, Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp. in 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011., 5943254, 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011, 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011, Munich, Germany, 22/05/11. https://doi.org/10.1109/CLEOE.2011.5943254

Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp. / Han, Ting; Madden, Steve; Bulla, Douglas et al.
2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011. 2011. 5943254 (2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp

AU - Han, Ting

AU - Madden, Steve

AU - Bulla, Douglas

AU - Debbarma, Sukanta

AU - Luther-Davies, Barry

PY - 2011

Y1 - 2011

N2 - In this paper, we report the first thermal nano-imprint fabrication of low loss As2S3 Chalocgenide glass waveguides. As 2S3 rib waveguides 2-4m wide and 1m high with losses below 0.5dB/cm at 1550nm were thermally embossed by a soft stamp made from Polydimethylsiloxane (PDMS) on a 100mm wafer scale.

AB - In this paper, we report the first thermal nano-imprint fabrication of low loss As2S3 Chalocgenide glass waveguides. As 2S3 rib waveguides 2-4m wide and 1m high with losses below 0.5dB/cm at 1550nm were thermally embossed by a soft stamp made from Polydimethylsiloxane (PDMS) on a 100mm wafer scale.

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U2 - 10.1109/CLEOE.2011.5943254

DO - 10.1109/CLEOE.2011.5943254

M3 - Conference contribution

SN - 9781457705335

T3 - 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011

BT - 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011

T2 - 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011

Y2 - 22 May 2011 through 26 May 2011

ER -

Han T, Madden S, Bulla D, Debbarma S, Luther-Davies B. Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp. In 2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011. 2011. 5943254. (2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference, CLEO EUROPE/EQEC 2011). doi: 10.1109/CLEOE.2011.5943254

Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp

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