Abstract
Extended X-ray absorption fine structure measurements have been used to characterize, at the atomic level, the thermally induced structural relaxation of InAs amorphized by ion implantation. Our results are consistent with a relaxation mechanism mediated by point-defect annihilation with concomitant reduction in both chemical and structural disorder. Though relaxation yields a decrease in chemical disorder, homopolar bonding is still retained in the fully relaxed amorphous structure.
Original language | English |
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Pages (from-to) | 1024-1027 |
Number of pages | 4 |
Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
Volume | 206 |
DOIs | |
Publication status | Published - May 2003 |
Event | 13th International conference on Ion beam modification of Mate - Kobe, Japan Duration: 1 Sept 2002 → 6 Sept 2002 |