Direct-write non-linear photolithography for semiconductor nanowire characterization

P. Parkinson*, N. Jiang, Q. Gao, H. H. Tan, C. Jagadish

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    7 Citations (Scopus)

    Abstract

    A practical bottleneck prohibiting the rapid, confident and damage-free electrical contacting of vapour-liquid-solid grown nanowires arises from the random spatial distribution and variation in quality of the nanowires, and the contact dimensions required. Established techniques such as electron-beam lithography or focused ion-beam deposition have challenges in scaling, damage or complexity that can make a large statistical sample difficult. We present a direct laser-writing technique to allow rapid electrical contacting of nanowires on a large variety of substrates.

    Original languageEnglish
    Article number335704
    JournalNanotechnology
    Volume23
    Issue number33
    DOIs
    Publication statusPublished - 24 Aug 2012

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