Discharge kinetics of inductively coupled oxygen plasmas: Experiment and model

C. S. Corr*, S. Gomez, W. G. Graham

*Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    53 Citations (SciVal)

    Fingerprint

    Dive into the research topics of 'Discharge kinetics of inductively coupled oxygen plasmas: Experiment and model'. Together they form a unique fingerprint.

    Physics