Double layer formation in the expanding region of an inductively coupled electronegative plasma

N. Plihon*, C. S. Corr, P. Chabert

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

66 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Double layer formation in the expanding region of an inductively coupled electronegative plasma'. Together they form a unique fingerprint.

Physics

Material Science

Biochemistry, Genetics and Molecular Biology