Dry Etching of SiO2 Thin Films for Optical Waveguide Fabrication

Wei Li; Douglas Bulla; Douglas Bulla; John Love; Barry Luther-Davies; Christine Charles; Roderick Boswell

Dry Etching of SiO₂ Thin Films for Optical Waveguide Fabrication

Wei Li, Douglas Bulla, Douglas Bulla, John Love, Barry Luther-Davies, Christine Charles, Roderick Boswell

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	CD Proceedings of ACOFT/AOS '04
Editors	B. Eggleton, D. Sampson, S. Frisken, A. Mitchell, S. Jackson, A. Ankiewicz, M. S
Place of Publication	Canberra
Publisher	IREE Society
Pages	ACOFT-PO19-1-3
Edition	Peer Reviewed
ISBN (Print)	0731552229
Publication status	Published - 2004
Event	Australian Conference on Optical Fibre Technology (ACOFT 2004) - Canberra Australia, Australia Duration: 1 Jan 2004 → …

Conference

Conference	Australian Conference on Optical Fibre Technology (ACOFT 2004)
Country/Territory	Australia
Period	1/01/04 → …
Other	July 5 2004

Cite this

@inproceedings{a47d0a17be414825b4c9c311d00d1304,

title = "Dry Etching of SiO2 Thin Films for Optical Waveguide Fabrication",

author = "Wei Li and Douglas Bulla and Douglas Bulla and John Love and Barry Luther-Davies and Christine Charles and Roderick Boswell",

year = "2004",

language = "English",

isbn = "0731552229",

pages = "ACOFT--PO19--1--3",

editor = "{B. Eggleton, D. Sampson, S. Frisken, A. Mitchell, S. Jackson, A. Ankiewicz, M. S}",

booktitle = "CD Proceedings of ACOFT/AOS '04",

publisher = "IREE Society",

edition = "Peer Reviewed",

note = "Australian Conference on Optical Fibre Technology (ACOFT 2004) ; Conference date: 01-01-2004",

}

Dry Etching of SiO₂ Thin Films for Optical Waveguide Fabrication. / Li, Wei; Bulla, Douglas; Bulla, Douglas et al.
CD Proceedings of ACOFT/AOS '04. ed. / B. Eggleton, D. Sampson, S. Frisken, A. Mitchell, S. Jackson, A. Ankiewicz, M. S. Peer Reviewed. ed. Canberra: IREE Society, 2004. p. ACOFT-PO19-1-3.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Dry Etching of SiO2 Thin Films for Optical Waveguide Fabrication

AU - Li, Wei

AU - Bulla, Douglas

AU - Love, John

AU - Luther-Davies, Barry

AU - Charles, Christine

AU - Boswell, Roderick

PY - 2004

Y1 - 2004

M3 - Conference contribution

SN - 0731552229

SP - ACOFT-PO19-1-3

BT - CD Proceedings of ACOFT/AOS '04

A2 - null, B. Eggleton, D. Sampson, S. Frisken, A. Mitchell, S. Jackson, A. Ankiewicz, M. S

PB - IREE Society

CY - Canberra

T2 - Australian Conference on Optical Fibre Technology (ACOFT 2004)

Y2 - 1 January 2004

ER -