Effect of ion-implantation on forming and resistive-switching response of NiO thin films

Robert G. Elliman, Muhammad N. Saleh, Sung Kim, Dinesh K. Venkatachalam, Taehyun Kim, Kidane Belay

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    1 Citation (Scopus)

    Abstract

    The forming voltage and set/reset response of sputter-deposited NiO thin films is studied as a function of implant fluence for samples implanted with Ni and O ions. The forming voltage of the films is shown to decrease with increasing ion fluence and to scale with the damage production rate of the different ions. In contrast, the set/reset response of the films was largely unaffected by the ion-implantation. These results are discussed in terms of the filamentary model of conduction and the thermochemical model of resistive switching.

    Original languageEnglish
    Title of host publicationMaterials and Physics for Nonvolatile Memories II
    PublisherMaterials Research Society
    Pages215-220
    Number of pages6
    ISBN (Print)9781605112237
    DOIs
    Publication statusPublished - 2010

    Publication series

    NameMaterials Research Society Symposium Proceedings
    Volume1250
    ISSN (Print)0272-9172

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