@inproceedings{a7d44f50eda845479a8754a21a218367,
title = "Effect of low energy implantation on the properties of Ti/Ni/Au contacts to n-SiC",
abstract = "The effect of low energy implantation of P or C ions in 3C-SiC on the properties of Ti/Ni/Au contacts has been examined for doses in the range 1013-1015 ions/cm2. Measurements of specific contact resistance, ρ c, were performed using the two-contact circular test structure. The magnitude of ρc for the Ti/Ni/Au contacts on unimplanted SiC was 1.29 × 10-6 Ω.cm2. The value of ρc increased significantly at an implant dose of 1 × 1015 ions/cm2. The dependence of ρc on ion dose has been measured using both C and P implant species.",
author = "Leech, {Patrick W.} and Holland, {Anthony S.} and Reeves, {Geoffrey K.} and Yue Pan and Mark Ridgway and Phillip Tanner",
note = "Publisher Copyright: {\textcopyright} 2015 Materials Research Society.; 2014 MRS Fall Meeting ; Conference date: 30-11-2014 Through 05-12-2014",
year = "2015",
doi = "10.1557/opl.2015.284",
language = "English",
series = "Materials Research Society Symposium Proceedings",
publisher = "Materials Research Society",
pages = "39--44",
editor = "E. Marquis and Gill, {S. K.} and C. Deo and K. Arakawa and Y. Zhang and F. Djurabekova and F. Soisson and K. Yasuda and G. Baldinozzi",
booktitle = "Materials and Radiation Effects for Advanced Nuclear Technologies",
}