Effect of rapid thermal annealing on the ordering of AlInP grown by metal-organic vapor-phase epitaxy

Xiaohong Tang*, Jinghua Zhao, Mee Koy Chin, Ting Mei, Zongyou Yin, Sentosa Deny, An Yan Du

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

Abstract

Spontaneous CuPt ordering is observed in Alx In1-x P layers grown by metal-organic vapor-phase epitaxy in pure nitrogen ambient with tertiarybutylphosphine as phosphorus precursor. Changes of the degree of ordering of the Alx In1-x P epilayer versus annealing temperature have been investigated by using photoluminescence and transmission electron diffraction. The degree of ordering of the Alx In1-x P layers is reduced after annealing the sample at a temperature higher than the sample growth temperature. It becomes completely disordered when the annealing temperature reaches 900 °C and above.

Original languageEnglish
Article number181906
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume87
Issue number18
DOIs
Publication statusPublished - 31 Oct 2005
Externally publishedYes

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