Effects of cross field diffusion in a low pressure high density oxygen/silane plasma

C. Charles*

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    8 Citations (Scopus)

    Abstract

    Wall charging was measured for a low pressure high density oxygen/silane plasma of various flow-rate ratios (R=1-10). It was found that the degree of electronegativity of the discharge close to the wall is the main varying parameter when changing R. A major transition in the physicochemistry of the discharge was observed for R=2. For R=<2, polymerization was observed in the positive ion spectrum which is accompanied by a depletion in the O+ and O- ions.

    Original languageEnglish
    Pages (from-to)1275-1283
    Number of pages9
    JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
    Volume20
    Issue number4
    DOIs
    Publication statusPublished - Jul 2002

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