Abstract
Wall charging was measured for a low pressure high density oxygen/silane plasma of various flow-rate ratios (R=1-10). It was found that the degree of electronegativity of the discharge close to the wall is the main varying parameter when changing R. A major transition in the physicochemistry of the discharge was observed for R=2. For R=<2, polymerization was observed in the positive ion spectrum which is accompanied by a depletion in the O+ and O- ions.
Original language | English |
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Pages (from-to) | 1275-1283 |
Number of pages | 9 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 20 |
Issue number | 4 |
DOIs | |
Publication status | Published - Jul 2002 |