Elastic cross sections for electron collisions with molecules relevant to plasma processing

J. S. Yoon, M. Y. Song, H. Kato, M. Hoshino, H. Tanaka, M. J. Brunger, S. J. Buckman, H. Cho*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

36 Citations (Scopus)


Absolute electron-impact cross sections for molecular targets, including their radicals, are important in developing plasma reactors and testing various plasma processing gases. Low-energy electron collision data for these gases are sparse and only the limited cross section data are available. In this report, elastic cross sections for electron-polyatomic molecule collisions are compiled and reviewed for 17molecules relevant to plasma processing. Elastic cross sections are essential for the absolute scale conversion of inelastic cross sections, as well as for testing computational methods. Data are collected and reviewed for elastic differential, integral, and momentum transfer cross sections and, for each molecule, the recommended values of the cross section are presented. The literature has been surveyed through early 2010.

Original languageEnglish
Article number033106
JournalJournal of Physical and Chemical Reference Data
Issue number3
Publication statusPublished - 29 Jul 2010
Externally publishedYes


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